Thermal atomic layer etching of copper by sequential steps involving oxidation and exposure to hexafluoroacetylacetone was written by Mohimi, Elham;Chu, Xiaoqing I.;Trinh, Brian B.;Babar, Shaista;Girolami, Gregory S.;Abelson, John R.. And the article was included in ECS Journal of Solid State Science and Technology in 2018.Category: copper-catalyst This article mentions the following:
We describe an at. layer etching (ALE) method for copper that involves cyclic exposure to an oxidant and hexafluoroacetylacetone (Hhfac) at 275°C. The process does not attack dielecs. such as SiO2 or SiNx, and the surface reactions are kinetically self-limiting to afford a precise etch depth that is spatially uniform. Exposure of a copper surface to mol. oxygen, O2, a weak oxidant, forms a ∼0.3 nm thick layer of Cu2O, which is removed in a subsequent step by exposure to Hhfac. The etch reaction involves disproportionation of Cu(hfac) intermediates, such that ∼0.09 nm copper is removed per cycle. Exposure of copper to ozone, a stronger oxidant, affords ∼15 nm of CuO; when this oxidized surface is exposed to Hhfac, 8.4 nm of copper is removed per cycle. The etch products, Cu(hfac)2 and H2O, are efficiently pumped away; H2O, a poor oxidant, does not attack the bare Cu surface. The roughness of the copper surface increases slowly over successive etch cycles. Thermochem. and bulk etching data indicate that this approach should work for a variety of other metals. In the experiment, the researchers used many compounds, for example, copper(ii)hexafluor-2,4-pentanedionate (cas: 14781-45-4Category: copper-catalyst).
copper(ii)hexafluor-2,4-pentanedionate (cas: 14781-45-4) belongs to copper catalysts. The evolution of transition metal catalysts has attained a stage of civilization that authorizes for an extensive scope of chemical bonds formation partners to be combined efficiently. Copper nanoparticles can catalyze the Ullmann coupling reaction in a wide range of applications.Category: copper-catalyst
Referemce:
Copper catalysis in organic synthesis – NCBI,
Special Issue “Fundamentals and Applications of Copper-Based Catalysts”